Object-oriented Design Patterns for Process Flow Simulations
نویسندگان
چکیده
Although simulators capable of dealing with the different kinds of processes in the simulation of semiconductor device fabrication are widely available, the combination of several of them to a whole process flow is still a complicated endeavor. This paper points out the difficulties arising in data exchange between simulators and we present as a solution the WAFER-STATE SERVER. Our WAFER-STATE SERVER is implemented as an object-oriented software package which allows the coupling of various tools of different vendors. The package also contains support for Technology CAD (TCAD) analysis tasks like optimization of the electrical characteristics of a semiconductor device or inverse modeling of doping profiles.
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تاریخ انتشار 2000